TY  - JOUR
T1  - Plasma Power Effect on the Surfaces of a Quartz Crystal During Etching using Tetrafluoroethane Gas
AU  - Masruroh Masruroh,Mahardika Auditia Hanif,Setyawan P. Sakti,D.J. Djoko H.   Santjojo
JO  - International Journal of Technology
VL  - 8
IS  - 8
SP  - 291
EP  - 319
PY  - 2017
DA  - 2017/12/27
SN  - 2087-2100
DO  - https://doi.org/10.14716/ijtech.v8i8.721
UR  - https://ijtech.eng.ui.ac.id/article/view/721