@article{ijtech-721, title={Plasma Power Effect on the Surfaces of a Quartz Crystal During Etching using Tetrafluoroethane Gas}, author={Masruroh Masruroh,Mahardika Auditia Hanif,Setyawan P. Sakti,D.J. Djoko H. Santjojo}, volume={8}, number={8}, year={2017}, month={Dec}, pages={1525-1532}, DOI={https://doi.org/10.14716/ijtech.v8i8.721}, journal={International Journal of Technology}, ISSN={2087-2100}}